Positioning systems

Positioning systems designed to accomplise specific application requirements, PM’s extensive expertise results in the developement of high-precision systems.

Standard Products

XY2Z-Theta motion system

Stage positioning of the wafer introduces high positioning accuracy and stability for non-contact inspection. It is designed for next-generation inspection and metrology applications.

Chi-Phi-XYZ system

Customised positioning system solution with compact footprint and pioneer design with a high travel accuracy within 5 degrees of freedom at lower speed. Popular application in material research and metrology application.

5-Axis Manipulator

Crucial positioning stability, dynamics and precision for field of in-line wafer inspection. Multi-axis positioning solution for smooth high-speed scanning and reliable operation. Application for non-contact, non-destructive measurement for inline front-end processes.

Customized Products

Please enquire for any custom modifications for customer applications.